P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで入手可能になり。初版は1993年発行。前版は1994年発行。

orgで入手可能になり。初版は1993年発行。前版は1994年発行。

the types of liquid chemicals listed below:

The Standard references existing SEMI Communication Standards to realize these layers as much as possible

This Test Method requires the use of an oxygen-free reference specimen

The Test Method is based on a light sectioning technique (see Related Information 1) where patterns of line segments or spots of light are projected onto a wafer surface and saw marks as well as the waviness peaks and valleys are oriented perpendicular to the direction of wafer transport

P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで入手可能になり。初版は1993年発行。前版は1994年発行。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.