D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display The correct testing method setting

The correct testing method setting shall be used to measure the dynamic or static CBU

AFM uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface

Although the requirements of this Specification focus on testing materials and components with UPW at elevated temperatures

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies

SEMI F38 — Test Method for Efficiency Qualification of Point-of-Use Gas Filters

D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display The correct testing method settingPlastic films substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Standard provides procedures for the measurement environmental condition to measure dimensions of plastic films substrates. This Standard provides guidance for measuring dimensions of plastic films substrates for electronic devices. Referenced SEMI Standards